A guide to hands-on MEMS design and prototyping by Joel A. Kubby

By Joel A. Kubby

No matter if you're a pupil taking an introductory MEMS path or a training engineer who must wake up to hurry fast on MEMS layout, this useful consultant offers the hands-on event had to layout, fabricate and attempt MEMS units. you'll how one can use foundry multi-project fabrication procedures for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. recommendations to the layout problem difficulties are supplied online
''Whether you're a pupil taking an introductory MEMS path or a practicing engineer who must wake up to hurry fast on MEMS layout, this functional advisor presents the hands-on event had to layout, fabricate and try out MEMS units. you are going to methods to use foundry multi-project fabrication approaches for inexpensive MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, to boot and routines and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with options to the layout problem difficulties and a variety of case experiences of MEMS devices''--  Read more... laptop generated contents word: 1. creation; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and attempt; eight. From prototype to product: MEMS deformable mirrors for adaptive optics

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