An Introduction to Microelectromechanical Systems by Nadim Maluf, Kirt Williams

By Nadim Maluf, Kirt Williams

Bringing you recent with the newest advancements in MEMS know-how, this significant revision of the best-selling An advent to Microelectromechanical structures Engineering provides you with a present knowing of this state-of-the-art expertise. You achieve functional wisdom of MEMS fabrics, layout, and production, and find out how it truly is being utilized in business, optical, scientific and digital markets. the second one variation gains fresh sections on RF MEMS, photograph MEMS, micromachining on fabrics except silicon, reliability research, plus an multiplied reference checklist.

With an emphasis on commercialized items, this precise source is helping you establish even if your program can make the most of a MEMS answer, know the way different functions and firms have benefited from MEMS, and choose and outline a manufacturable MEMS method in your software. you find find out how to use MEMS expertise to let new performance, enhance functionality, and decrease dimension and value. The publication teaches you the services and obstacles of MEMS units and tactics, and is helping you speak the relative advantages of MEMS in your company’s administration. From serious discussions on layout operation and procedure fabrication of units and structures, to a radical rationalization of MEMS packaging, this easy-to-understand e-book basically explains the fundamentals of MEMS engineering, making it a useful reference to your paintings within the box.

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Additional resources for An Introduction to Microelectromechanical Systems Engineering (2nd Edition)

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Micromachining has also been used to incorporate structures such as mirrors on the surface of III-V semiconductors to create new devices, including tunable lasers [12]. Moreover, micromachining using GaAs and other group Other Materials and Substrates 23 III-V compound semiconductors is a practical way to integrate RF switches, antennas, and other custom high-frequency components with ultra-high-speed electronic devices for wireless telecommunications. Polymers Polymers are long chains of carbon (or sometimes silicon) atoms with various chemical side groups attached to the carbon [13].

12] Li, M. 6-nm Tuning Range,” IEEE Photonics Technology Letters, Vol. 10, No. 1, January 1998, pp. 18–20. [13] Van Vlack, L. , Elements of Materials Science and Engineering, 6th Edition, Reading, MA: Addison-Wesley, 1989, pp. 32–36. [14] DuPont High Performance Films, “Kapton Data Sheet H-38492-2,” Circleville, OH, August 1997. , C. -C. Tai, “Design, Fabrication, and Testing of Micromachined Silicone Rubber Membrane Valves,” Journal of Microelectromechanical Systems, Vol. 8, No. 4, December 1999, pp.

Etching in HF or ultrasonic drilling typically yields coarsely defined features with poor edge control. Thin metal films can be readily deposited on glass or quartz substrates and defined using standard lithographic techniques. Channels microfabricated in glass substrates with thin metal microelectrodes have been useful in making capillaries for miniaturized biochemical analysis systems. 22 Materials for MEMS Silicon Carbide and Diamond Silicon carbide and diamond continue to captivate the imagination of many in the micromachining community.

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